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Line Heating Flexible Heaters

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Modular-Gas-Line-Heaters

Modular Gas Line Heaters

 (84)
Gas Delivery
Tetraethyl orthosilicate (TEOS), Boron trichloride (BCl3), Aluminum Chloride (AlCl3), Chlorine trifluoride (ClF3) and Dichlorosilane (DCS) are gases that condense or liquefy due to a phase shift at low temperatures. In semiconductor processes the condensation occurs in the gas line and puddles in the shower head before being injected into the vacuum chamber. A substantial number of wafer defects will occur if liquefied gases are injected into the vacuum chamber. Uniform heating of the lines will prevent condensation. TEOS lines are typically heated above 194°F (90°C) and BCl3 above 86°F (30°C), depending on pressure and flow rate. The optimum line temperature will vary ...


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VCR Union Heaters/Insulators

VCR Union Heaters/Insulators

 (8)
VCR Valve Heaters

VCR Valve Heaters

 (4)
STRETCH-TO-LENGTH® Heaters

STRETCH-TO-LENGTH® Heaters

 (32)
In semiconductor processes condensation of many critical gases occurs due to a phase shift at low temperatures. Burning of the gases will occur if the delivery line is too hot. High or low temperature condition may result in undesirable particulates and cause costly device defects and tool maintenance.
The Watlow STRETCH-TO-LENGTH® (S-T-L) gas line heater system was developed as an easy to assemble temperature solution with performance superior to heat tape. S-T-L's preformed construction gives engineers the ability to wrap it around the delivery line with consistent heater/gas line contact for improved temperature uniformity. S-T-L's flexibility gives engineers the ability to compensate for the size of different components thus ...


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Modular Pump Line Heaters

Modular Pump Line Heaters

 (80)
The tight contact fit of Watlow’s pump line heaters provide superior, uniform heating of transfer lines.

Agency Certification, Recognition Compliance, and Approvals
(Contact your Watlow representative for specific application and approvals.)
  • Complies with SEMI S2-93 standards
  • UL® recognized for U.S. and Canadian safety standards
  • CE, VDE
  • National Electrical Code (NEC), Article #427-23
  • UL® Listed available
General Specifications
  • Heater and jacket material: reinforced silicone rubber fabric
  • Color: insulation and outer jacket is gray, heater is red-orange
  • Snap type fasteners: 1/2 in. (13 mm) nominal diameter metal construction with nylon cover; max. operating temperature 392°F ...

    Search Modular Pump Line Heaters - 80 Items

90° Radius Elbow Heaters

90° Radius Elbow Heaters

 (8)
  • 0.25 in. (6 mm) or 0.5 in. (13 mm) silicone rubber sponge insulation available
  • With or without tangents
  • Will fit both butt-weld and flanged style tubing elbows


45° Radius Elbow Heaters

45° Radius Elbow Heaters

 (8)
  • 0.25 in. (6.4 mm) or 0.5 in. (13 mm) silicone rubber sponge insulation available
  • With or without tangents
  • Will fit both butt-weld and flanged style tubing elbows


Tee Section Heaters

Tee Section Heaters

 (4)
  • 0.25 in. (6 mm) or 0.5 in. (13 mm) silicone rubber sponge insulation available
  • Will fit both butt-weld and flanged style tee sections


Bellows Section Heaters

Bellows Section Heaters

 (18)
  • 0.25 in. (6 mm) or 0.5 in. (13 mm) silicone rubber sponge insulation available
  • Will fit both butt-weld and flanged style flexible sections


Flange Heaters

Flange Heaters

 (5)
  • 0.25 in. (6 mm) or 0.5 in. (13 mm) silicone rubber sponge insulation available
  • For both KF screw flanges and ISO clamp flanges