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Modular Gas Line Heaters

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Gas Delivery
Tetraethyl orthosilicate (TEOS), Boron trichloride (BCl3), Aluminum Chloride (AlCl3), Chlorine trifluoride (ClF3) and Dichlorosilane (DCS) are gases that condense or liquefy due to a phase shift at low temperatures. In semiconductor processes the condensation occurs in the gas line and puddles in the shower head before being injected into the vacuum chamber. A substantial number of wafer defects will occur if liquefied gases are injected into the vacuum chamber. Uniform heating of the lines will prevent condensation. TEOS lines are typically heated above 194°F (90°C) and BCl3 above 86°F (30°C), depending on pressure and flow rate. The optimum line temperature will vary depending on the process parameters.

Specifications
  • Watt density of 2.5 W/in2 (0.4 W/cm2) on gas line O.D.
  • UL® recognized for U.S. and Canadian safety standards
  • Heaters and insulators meet UL94-HB flammability requirements
  • Insulated straight fillers for 100 percent line coverage; elbows and tees are trim-to-fit to proper length
  • I.D. available: 1/4, 3/8, 1/2, 3/4 in. (6, 9.5, 13, 19 mm)
  • 120V standard, other voltages available
  • Small metal snaps
  • 3/8 in. (9.5 mm) wall, silicone rubber, closed cell sponge


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Modular-Gas-Line-Heaters

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Modular Gas Line Heaters

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  Results 1 - 25 of 84 Unit of Measure: Imperial | Metric | Both  1 2 3 4 

Code No.

Description

Watts

Voltage

Length

Heater I.D.

008060C1 Heated straight 12 W 120 VAC 6 in
152 mm
0.25 in
6 mm
008090C1 Heated straight 18 W 120 VAC 9 in
229 mm
0.25 in
6 mm
008120C1 Heated straight 24 W 120 VAC 12 in
305 mm
0.25 in
6 mm
008180C1 Heated straight 36 W 120 VAC 18 in
457 mm
0.25 in
6 mm
008240C1 Heated straight 48 W 120 VAC 24 in
610 mm
0.25 in
6 mm
008360C1 Heated straight 72 W 120 VAC 36 in
914 mm
0.25 in
6 mm
008180C0 Straight insulator Trim-to-fit N/A 18 in
457 mm
0.25 in
6 mm
008020C0 90° union elbow insulator Trim-to-fit N/A Elbow 0.25 in
6 mm
008030C0 Union tee insulator Trim-to-fit N/A Tee 0.25 in
6 mm
008060C1A Heated straight 12 W 120 VAC 6 in
152 mm
0.25 in
6 mm
008090C1A Heated straight 18 W 120 VAC 9 in
229 mm
0.25 in
6 mm
008120C1A Heated straight 24 W 120 VAC 12 in
305 mm
0.25 in
6 mm
008180C1A Heated straight 36 W 120 VAC 18 in
457 mm
0.25 in
6 mm
008240C1A Heated straight 48 W 120 VAC 24 in
610 mm
0.25 in
6 mm
008360C1A Heated straight 72 W 120 VAC 36 in
914 mm
0.25 in
6 mm
008060C1K Heated straight 12 W 120 VAC 6 in
152 mm
0.25 in
6 mm
008090C1K Heated straight 18 W 120 VAC 9 in
229 mm
0.25 in
6 mm
008120C1K Heated straight 24 W 120 VAC 12 in
305 mm
0.25 in
6 mm
008180C1K Heated straight 36 W 120 VAC 18 in
457 mm
0.25 in
6 mm
008240C1K Heated straight 48 W 120 VAC 24 in
610 mm
0.25 in
6 mm
008360C1K Heated straight 72 W 120 VAC 36 in
914 mm
0.25 in
6 mm
012060C1 Heated straight 18 W 120 VAC 6 in
152 mm
0.25 in
6 mm
012090C1 Heated straight 27 W 120 VAC 9 in
229 mm
0.25 in
6 mm
012120C1 Heated straight 36 W 120 VAC 12 in
305 mm
0.25 in
6 mm
012180C1 Heated straight 54 W 120 VAC 18 in
457 mm
0.25 in
6 mm
  Results 1 - 25 of 84 1 2 3 4